Integrated Passive Devices

We provide

The High-Q™ Integrated Passive Device (IPD) process technology from onsemi offers a copper on high resistivity silicon platform ideal for the production of passive devices such as baluns, filters, couplers, and diplexers that are used in portable, wireless and RF applications. IPD provides a cost effective solution for RF system in package. A foundry shuttle service is available for engineering prototypes. IPD technology supports fabrication of copper inductors, precision capacitors, and precision resistors in a world-class 200 mm wafer manufacturing facility. Design services are offered for custom applications. A full feature design kit is available to customers for layout, simulation, and verification.

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Features Capabilites

Parameters

Family

Value

Si HRS Substrate

1.5 kΩ∙cm

MIM Capacitance density

0.62 F/µm²

Resistor Sheet Resistance

9 Ω/square

Inductor Sheet Resistance

3.5 mΩ/square

Base Si Oxide Thickness

5.6 µm

MIM Operating Voltage

20 V

M1 Al Metal Thickness

2 µm

MN Cu Metal Thickness

5 µm

MN2 Cu Metal Thickness

5 µm

Bond Pad

Wirebond, Flip-Chip

1-0 of 0

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Features

High-Q™ copper inductor

MIM capacitor

TiN metal resistor

Three metal routing layers (1 Al, 2 Cu)

200 mm silicon wafer diameter

High resistivity silicon substrate

Planar dual damascene copper process

Superior process control

Full feature design kit

Design services

Foundry shuttle service

Smaller area than discrete solutions

Thinner than LTCC

Lower cost than GaAs

Better performance than other silicon solutions

Custom CCD Image Sensor Capabilities

(All Values Typical at 25°C)

Inductors

Parameter

Value

Copper Thickness

5, 10 µm

Min Width

5 µm

Max Width

40 µm

Min Space

3 µm

Min Inner Diameter

50 µm

Recommended Range

1 - 50 nH

Peak Q

25 - 45 nH

1-0 of 0

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Capacitors

Parameter

Value

Min Width

15.75 µm

Max Width

450 µm

Max Area

45 000 µm²

Recommended Range

1 - 100 pF

1-0 of 0

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Resistors

Parameter

Value

Min Width

2 µm

Min Length

9 µm

1-0 of 0

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CAD Tool Compatibility

Shecmatic Capture + Place and Route: Cadence Viruoso, Agilent ADS

Simulation: Ansoft HFSS, Agilent ADS

Physical Verification: Cadence Assura, Mentor Calibre

Software

IPD1/2

PDKs (Pcells & Models): Cadence Virtuoso OA, Keysight ADS, NI AWR Environment V13
Templates: ANSYS HFSS, Integrand EMX, Sonnet

IPD0

Excel Calculator Tool